JUNE 17th(Sunday) |
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19.00 |
Get together |
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JUNE 18th(Monday) |
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9.00 - 9.30 |
OPENING |
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Session A, Chair: T.Gustafsson |
9.30 – 10.15 |
Structural Characterization of Advanced CMOS Technology |
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M. Copel and R. Pezzi |
10.15 – 11.00 |
The Effect of Strain on Interfacial Structures of Gate
Dielectrics and Q-dots |
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Dae Won Moon and Man-Ho Cho |
11.00 - 11.30> |
COFFEE BREAK |
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Session
B, Chair: L.Goncharova |
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11.30 – 12.00 |
Quantitative (?) analysis of thin dielectrica with ultra high
resolution ERD, MEIS and RBS. |
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W.Vandervorst, T.Conard, S.Giangandri,
B,Brijs, A.Bergmaier, G.Dollinger,K.Kimura,J.A.Vandenberg and M.Werner |
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12.00 – 12.30 |
MEIS as a probe of alloying, sintering and adsorbate induced
segregation behaviour of supported bimetallic nanoparticles |
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R Haire, J. Gustafson, T. E. Jones, T. G. Owens, A.G. Trant, C. J. Baddeley,T. C. Q. Noakes
and P Bailey |
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12.30
– 14.00 |
LUNCH |
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Session
C, Chair: Y.Kido |
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14.00 – 14.45 |
An Introduction to the Helium Ion Microscope |
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John Notte, Bill Ward and Nick Economou |
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14.45 – 15.15 |
Quantitative analysis of Au growth on B/Si by TOF-LEIS |
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S. Prusa, D. Primetzhofer, M. Kolibal, S.N. Markin, T. Sikola,
P. Zeppenfeld and P. Bauer |
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15.15 –
15.45 |
COFFEE BREAK |
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Session
D, Chair: P.Bailey |
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15.45 – 16.30 |
An analytical energy-loss line shape for high depth resolution in ion-beam
analysis |
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P.L Grande*, A. Hentz*, R.P. Pezzi*,
I.J.R. Baumvol* and G. Schiwietz# |
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16.30 – 17.00 |
The analysis of ultra-thin films with a magnetic spectrometer
in combination with conventional RBS |
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B. Brijs1, K. Kimura2, S. Giangrandi1,3, T. Sajavaara1,4, A. Vantomme4, W. Vandervorst1,3, |
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JUNE
19th (Tuesday) |
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Session
E, Chair: J. O´Connor |
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9.00 – 9.45 |
A Medium Energy Ion Scattering simulation model for the extraction of the
atomic concentration depth profiles of ultra shallow layers from energy spectra |
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Paul Bailey, Tim Noakes, Jaap van den
Berg, Micheal Reading, Matt Werner,
Thierry Conard, and Wilfried Vandervorst |
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9.45 – 10.30 |
Gate metal-induced diffusion and interface reactions in metal
oxide dielectrics |
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L.V. Goncharova, M. Dalponte,
E. Garfunkel, T. Gustafsson |
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10.30
– 11.00 |
COFFEE BREAK |
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Session
F, Chair: K.Kimura |
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11.00 – 11.45 |
Non-equilibrium Charge States and Scattering Potentials in
Ion-Solid Interactions |
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G. Schiwietz and P.L. Grande |
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11.45 – 12.30 |
High Resolution ERD Channeling |
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Andreas Bergmaier and Günther Dollinger |
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12.30
– 14.00 |
LUNCH |
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14.00 |
EXCURSION TO MEISSEN |
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JUNE
20th (Wednesday) |
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Session
G, Chair: M.Copel |
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9.00 – 9.45 |
Surface structural studies with MEIS |
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D.P. Woodruff, G.S. Parkinson, A.J. Window and D.C.
Sheppard |
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9.45 – 10.30 |
The structure of 2- and 3-dimensional rare earth silicides on
silicon (111) studied by MEIS |
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S. P. Tear |
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10.30
– 11.00 |
COFFEE BREAK |
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Session
H, Chair: P.Woodruff |
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11.00 – 11.45 |
Characterising nanostructured materials using MEIS |
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T.C.Q. Noakes and P. Bailey |
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11.45 – 12.30 |
Au Nano-particles Grown on Oxide Substrates |
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Yoshiaki Kido and Tetsuaki Okazawa |
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12.30
– 14.00 |
LUNCH |
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Session
I, Chair : G. Schiwietz |
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14.00 – 14.45 |
Interatomic potentials at surfaces from rainbow scattering and
atom diffraction |
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A. Schüller, H. Winter and K.Gärtner |
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14.45 – 15.15 |
Depth resolution optimization and role of multiple scattering
in low-energy TOF-ERDA |
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Simone Giangrandi, B. Brijs, K. Arstila,
T. Sajavaara, A. Vantomme and W.Vandervorst |
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15.15
– 15.45 |
COFFEE BREAK |
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Session J; Chair : D.W.Moon |
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15.45 – 16.30 |
Analysis of nanostructures by using 3D-MEIS |
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Takane Kobayashi, Christopher Bonet, Steve
P. Tear , Shoichi Mure, Masaaki Maehara and Takashi Sato |
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16.30 – 17.00 |
The use of ion beam analysis on the investigation of
alternative metal-oxide-semiconductor structures |
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L.Miotti and I.J.R.Baumvol |
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17.00 – 18.00 |
Poster Session |
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18.30 |
Coach to Dinner in the “Sophienkeller” (Dresden center) |
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JUNE
21th (Thursday) |
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Session
K, Chair: W.Lennard |
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9.30 – 10.00 |
MEIS Investigation of 3-dimensional Holmium Silicide Grown on
Si(100). |
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T J Wood, C Bonet, T. C. Q. Noakes, P.
Bailey and S. P. Tear |
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10.00 - 10.30 |
Deuterium on Palladium - Work in Progress |
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J.O´Connor |
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10.30
– 11.00 |
COFFEE BREAK |
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Session
L, Chair: A. Bergmaier |
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11.00 – 11.45 |
Depth profiling with high-resolution RBS: comparison and
combination with other analytical techniques |
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K. Kimura, K. Nakajima,H. Nohira, T.
Hattori,T. Conard and W. Vandervorst |
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11.45 – 12.30 |
High resolution RBS/channeling measurements of Si strain distributions below ITO
and CuO ultrathin films |
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T. Osipowicz, P. Malar, T.K. Chan and B.
Ho |
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12:30
- 12.40 |
Closing |
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12.40
– 14.00 |
LUNCH |
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