Thermal model for flashlamp annealing of 3C-SiC/Si multilayer systems (i-FLASiC)

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Smith, M.; Mcmahon, R. A.; Voelskow, M.; Skorupa, W.; Stoemenos, J.

Abstract

A thermal model for flash lamp annealing of 3C-SiC/Si multilayer systems is developed.

Keywords: thermal model; SiC; flash lamp annealing

Lecture (Conference)
5th European Conference Silicon Carbide and Related Materials, 31.08.-04.09.2004, Bologna, Italy

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