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Roughness Improvement and Hardness Enhancement in Nanoscale Al/AlN Multilayered Thin Films

Wang, X.; Kolitsch, A.; Möller, W.

• Applied Physics Letters, 71 (14), 6 October 1997, 1951-1953
  DOI: 10.1063/1.119752
  Cited 39 times in Scopus

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