Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

Deposition of tetrahedral hydrogenated amorphous carbon using a novel Elecron Cyclotron Wave Resonance reactor

Weiler, M.; Lang, K.; Li, E.; Robertson, J.

• Applied Physics Letters Volume 72, Number 11, pp 1314-1316
  DOI: 10.1063/1.121069
  Cited 86 times in Scopus

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