Development of a cobalt liquid alloy ion source

Hesse, Evelyn; Bischoff, Lothar; Teichert, Jochen

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Development of a cobalt liquid alloy ion source

Hesse, E.; Bischoff, L.; Teichert, J.

Abstract

A cobalt-neodymium liquid alloy ion source for applications in focused ion beam devices was developed and investigated. The performance and the main parameters of the ion source are presented.

Journal of Physics D: Applied Physics (Rapid Communication) 27 (1994) pp. 427-428

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