Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

Implantation and growth of large Beta-FeSi₂ precipitates and Alpha-FeSi₂ network structures in silicon

Reuther, H.; Dobler, M.

• Applied Physics Letters 69 (1996) 21 pp. 3176-3178
  DOI: 10.1063/1.117952
  Cited 12 times in Scopus

Permalink: https://www.hzdr.de/publications/Publ-874