Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

The growth and microstructure of magnetron sputtered Ti₂AlN MAX phase thin films characterized by in-situ x-ray diffraction

Beckers, M.; Schell, N.; Martins, R. M. S.; Mücklich, A.; Möller, W.

• Lecture (Conference)
  14th International Summer School on Vacuum, Electron and Ion Technologies (VEIT), 12.-16.09.2005, Sunny Beach, Bulgaria

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