Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

Ion beam synthesis of CoSi2 for nano-interconnects

Schmidt, B.

Keywords: Ion beam synthesis; Fib; Co++-implantation; nanowires

• Lecture (others)
  Seminar FhG Center of Nanotechnology Dresden, 13.10.2005, Dresden, Germany

Permalink: https://www.hzdr.de/publications/Publ-8060