Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

Effects of low magnetic fields on nitrogen implantation in silicon by plasma immersion

Tan, I. H.; Ueda, M.; Dallaqua, R. S.; Abramof, E.; Reuther, H.

• Lecture (Conference)
  8th Brazilian Meeting of Plasma Physics, 27.-30.11.2005, Niteroi, Rio de Janeiro, Brazil

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