Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

Influence of the plasma density on the performance of plasma immersion íon implantation of silicon surface

Castro, R. M.; Ueda, M.; Oliveira, R. M.; Reuther, H.; Morena, B. L. D.

• Lecture (Conference)
  8th Brazilian Meeting of Plasma Physics, 27.-30.11.2005, Niteroi, Rio de Janeiro, Brazil

Permalink: https://www.hzdr.de/publications/Publ-7890