Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

Blue photoluminescence from high-dose Si+ - and Ge+ - implanted silicon dioxide layers

Rebohle, L.; Tyschenko, I. E.; Fröb, H.; Leo, K.; Yankov, R. A.; von Borany, J.; Skorupa, W.

• Microelectronic Engineering 36 (1997) 107
• Vortrag (Konferenzbeitrag)
  10th Biennial Conf. on Insulating Films on Semiconductors, Stenungsund, Sweden, June 11 - 14, 1997

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