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2 PublicationsTEM-Investigation of Si(001) Modified by Pr Implantation
Mücklich, A.; Kögler, R.; Eichhorn, F.
Abstract
TEM-Investigation of Si(001) Modified by Pr Implantation
Keywords: high-K dielectrics; Pr oxide; Pr silicide; Pr silicate
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Poster
Microscopy Conference, 28.08.-02.09.2005, Davos, Schweiz -
Contribution to proceedings
Microscopy Conference 2005, 28.08.-02.09.2005, Davos, Switzerland
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