Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationElectrical effects of residual defects in Si after high energy implantation of Ge+ ions and annealing
Kögler, R.; von Borany, J.; Panknin, D.; Skorupa, W.
-
Nuclear Instruments and Methods in Physics Research B 89 (1994) pp. 350-353
DOI: 10.1016/0168-583X(94)95198-5
Cited 3 times in Scopus
Permalink: https://www.hzdr.de/publications/Publ-63
Years: 2023 2022 2021 2020 2019 2018 2017 2016 2015