High current FIB system for micromechanics application

Bischoff, Lothar; Hesse, Evelyn; Hofmann, Gerd; Naehring, Friedrich; Probst, Werner; Schmidt, Bernd; Teichert, Jochen

doi:10.1016/0167-9317(93)90054-9

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High current FIB system for micromechanics application

Bischoff, L.; Hesse, E.; Hofmann, G.; Naehring, F.; Probst, W.; Schmidt, B.; Teichert, J.

Abstract

A high current Focused Ion Beam (FIB) system, designd to achieve current dendities above 10 A/cm2 is presented. The system parameters and properties are discussed and first applications in the field of micromechanics are shown.

Microelectronic Engineering 21 (1993) pp. 197-200
DOI: 10.1016/0167-9317(93)90054-9
Cited 10 times in Scopus

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