Nanopatterning of Si Surfaces by low-energy ion sputtering

Gago, Raul

HZDR
Institutes
Research
Press & News
Career
Technology Transfer

Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

Total number to be selected: 1 Record

1 Publication

Nanopatterning of Si Surfaces by low-energy ion sputtering

Gago, R.

Abstract

In this seminar the production of nanopatterning by ion beam sputtering (IBS) is presented, namely ripple and dot morphologies. The work is focused on the irradiation of Si surfaces but a general view of this research field is also discussed. Finally, the search of potential applications for these nanostructures is addresed.

Keywords: Ion sputtering; nanopatterning; ripples; nanodots

Lecture (others)
05.05.2003 Forschungsseminar Micro- und Nano-Elektronik, Institut Für Materialwissenschaften Bergische Universität, Wuppertal (gez. Prof. Dr. Clivia SOTOMAYOR-TORRES)

Permalink: https://www.hzdr.de/publications/Publ-5457

Years: 2023 2022 2021 2020 2019 2018 2017 2016 2015