Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

Partial Oxidation of Implanted Si by Humidity Penetrated into Damaged SiO2 Substrates

Müller, T.; Heinig, K.-H.; Schmidt, B.

• Lecture (others)
  Project Meeting, EU Growth Project "Nanoparticules for Electronics" (NEON), Toulouse, 3-6 December, 2002

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