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Physical and electronic properties of thin siliconoxynitride layers prepared by rapid thermal processing

Beyer, R.; Burghardt, H.; Prösch, G.; Thomas, E.; Reich, R.; Grambole, D.; Herrmann, F.; Weidner, G.; Syhre, H.; Dittmar, K.

• Contribution to proceedings
  4th Int. Symp. on Trends and New Applic. in Thin Films and 11th Conf. on High Vacuum, Interfaces, 07.-11.03.1994, Dresden, Deutschland
  Thin Films: DGM Informationsgesellschaft

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