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Laterally resolved polymorph conversion in Ga2O3 using FIBs

Bektas, U.; Klingner, N.; Hübner, R.; Chekhonin, P.; Liedke, M. O.; Hlawacek, G.

Keywords: FIB

Involved research facilities

• Ion Beam Center DOI: 10.17815/jlsrf-3-159

Related publications

• DOI: 10.17815/jlsrf-3-159 is cited by this (Id 38690) publication

• Lecture (Conference) (Online presentation)
  Defect Engineering in SiC and Other Wide Bandgap Semiconductor, 22.-24.10.2023, Erlangen, Shenzen, Deutschaldn, China

Permalink: https://www.hzdr.de/publications/Publ-38690