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Inherent Possibilities and Restrictions of Plasma Immersion Ion Implantation Systems

Mändl, S.; Brutscher, J.; Günzel, R.; Möller, W.

• Journal of Vacuum Science and Technology. Part B 14 (1996) 4 pp. 2701-2706
  DOI: 10.1116/1.589007
  Cited 57 times in Scopus

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