Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication

Analysis of X-ray rocking curves in (001) silicon crystals implanted with nitrogen by plasma immersion ion implantation

Abramof, E.; Beloto, A. F.; Ueda, M.; Gomes, G. F.; Berni, L. A.; Reuther, H.

Abstract

High-resolution X-ray diffraction methods have been used to characterize nitrogen doped silicon obtained by PIII.

  • Nuclear Instruments and Methods B 161-163 (2000) 1054-1057

Permalink: https://www.hzdr.de/publications/Publ-3557

Years: 2023 2022 2021 2020 2019 2018 2017 2016 2015