Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationSpatial distribution of gettering centres in ion-implanted and annealed silicon
Kögler, R.; Eichhorn, F.; Mücklich, A.; Skorupa, W.; Danilin, A. B.
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Lecture (Conference)
11th. Int. Conf. on Ion Beam Modification of Materials, Amsterdam, The Netherlands, Aug. 31 - Sept. 4, 1998
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