Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

Precisely doping semiconductors by ion implantation

Zhou, S.

Involved research facilities

• Ion Beam Center DOI: 10.17815/jlsrf-3-159

Related publications

• DOI: 10.17815/jlsrf-3-159 is cited by this (Id 24698) publication

• Lecture (others)
  Invited seminar at University of Warsaw, 22.09.2016, Warsaw, Poland

Permalink: https://www.hzdr.de/publications/Publ-24698