Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationInterconnection lines following the surface topography fabricated by writing focused ion beam implantation
Bischoff, L.; Teichert, J.; Hesse, E.
Abstract
The Rossendorf Focused Ion Beam IMSA-100 was used for writing Co-implantation over a topographical structure surface with a prtly controlled focus. After a subsequent annealing the resulting CoSi2 interconnection lines were analysed by SEM and electrical measurements. Also the influence of the depth of focus on the height of the surface contours as well as the resulting radial beam profiles were investigated.
-
Microelectronic Engineering 27 (1995) pp. 351-354
DOI: 10.1016/0167-9317(94)00123-C
Cited 9 times in Scopus
Permalink: https://www.hzdr.de/publications/Publ-240
Years: 2023 2022 2021 2020 2019 2018 2017 2016 2015