Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationApplication of the ECR slot antenna plasma source for ion implantation
Korzec, D.; Raiko, V.; Engemann, J.; Günzel, R.; Brutscher, J.; Möller, W.
- Surf. Coat. Technol. 93 (1997) 217
Permalink: https://www.hzdr.de/publications/Publ-2327
Years: 2023 2022 2021 2020 2019 2018 2017 2016 2015