Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationMetal gettering by defective regions in carbon-implanted silicon
Kögler, R.; Kaschny, J. R.; Yankov, R. A.; Werner, P.; Danilin, A. B.; Skorupa, W.
- Solid State Phenomena 57/58 (1997) 63
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