Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

Analysis of mechanisms in ECR-PECVD of BN films using in situ ellipsometry

Fukarek, W.; Möller, W.

• Lecture (Conference)
  DACH - Kolloquium, Giengen, Oct. 6-8, 1998

Permalink: https://www.hzdr.de/publications/Publ-2213