Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationBackscattered helium spectroscopy in the helium ion microscope: Principles, resolution and applications
van Gastel, R.; Hlawacek, G.; Dutta, S.; Poelsema, B.
Abstract
We demonstrate the possibilities and limitations for microstructure characterization using backscattered particles from a sharply focused helium ion beam. The interaction of helium ions with matter enables the imaging, spectroscopic characterization, as well as the nanometer scale modification of samples. The contrast that is seen in helium ion microscopy (HIM) images differs from that in scanning electron microscopy (SEM) and is generally a result of the higher surface sensitivity of the method. It allows, for instance, a much better visualization of low-Z materials as a result of the small secondary electron escape depth. However, the same differences in beam interaction that give HIM an edge over other imag- ing techniques, also impose limitations for spectroscopic applications using backscattered particles. Here we quantify those limitations and discuss opportunities to further improve the technique.
Keywords: Helium ion microscopy; Ion scattering; Rutherford backscattering spectroscopy
Involved research facilities
- Ion Beam Center DOI: 10.17815/jlsrf-3-159
Related publications
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 21439) publication
-
Nuclear Instruments and Methods in Physics Research B 344(2015), 44-49
Online First (2014) DOI: 10.1016/j.nimb.2014.11.073
Cited 13 times in Scopus
Permalink: https://www.hzdr.de/publications/Publ-21439
Years: 2023 2022 2021 2020 2019 2018 2017 2016 2015