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Corundum-type Fe-doped cathodic arc evaporated Al-Cr-O coatings

Koller, C. M.; Ramm, J.; Polcik, P.; Munnik, F.; Paulitsch, J.; Mayrhofer, P. H.

Abstract

A quaternary alloying concept comprising the addition of 1-5 at% Fe to Al0.7Cr0.3 targets for cathodic arc evaporation at 550 °C is investigated regarding its influence on promoting singe-phase α-(Al,Cr)2O3 film growth. Based on detailed X-ray diffraction and transmission electron microscopy studies we can show that the α-phase fraction correlates with the incorporated Fe content and increases with increasing film thickness at the expense of the cubic phases.

Keywords: Corundum-type aluminium oxide; (Al; Cr)₂O₃; (Al; Cr; Fe)₂O₃; cathodic arc evaporation

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