Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationNanopattering on crystal Ge surfaces
Ou, X.; Grenzer, J.; Facsko, S.
Abstract
In contrast to the nanopattering on amorphous semiconductor surfaces by ion irradiation, nanostructures on crystal Ge surfaces are created by irradiation under the temperatures above the recrystallization temperature. The temperature, fluence and orientation dependence on the nanopattens formation are demonstrated in this talk.
Keywords: irradiation; nanopattern; crystal Ge surface
Involved research facilities
- Ion Beam Center DOI: 10.17815/jlsrf-3-159
Related publications
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 18273) publication
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Lecture (others)
Forschergruppe 845 project workshop, 07.-08.11.2012, Dresden, Germany
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