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Synthesis, microstructure, and mechanical properties of YPd3B thin films

Takahashi, T.; Iskandar, R.; Munnik, F.; Music, D.; Mayer, J.; Schneider, J. M.

Abstract

Ternary Y-Pd-B thin films have been synthesized by magnetron sputtering from elemental targets to investigate the mechanical properties of the perovskite YPd3B phase. The as-deposited YPd2.73B1.18 film is identified as a single phase fcc-type structure with the measured lattice parameter of 0.415(5) nm. The film microstructure consists of dense columnar grains. The elastic modulus of the YPd2.73B1.18 film is determined to be 137 GPa by nanoindentation, which is in good agreement with ab initio calculations reported previously. The measurement of the critical shear stress for the onset of plasticity suggests that YPd3B can be classified as ductile material.

Keywords: Thin films; Transition metal alloys and compounds; Vapor deposition; Mechanical properties

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