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Structure and electrical properties of transparent conductive doped ZnO grown by reactive magnetron sputtering

Cornelius, S.; Vinnichenko, M.; Munnik, F.; Heller, R.; Kolitsch, A.; Möller, W.

Keywords: Al-doped ZnO; transparent conductive oxide; zinc oxide; magnetron sputtering; doping; activation

Involved research facilities

• Ion Beam Center DOI: 10.17815/jlsrf-3-159

Related publications

• DOI: 10.17815/jlsrf-3-159 is cited by this (Id 16510) publication

• Invited lecture (Conferences)
  IOP Workshop "Plasmas, Surfaces and Thin Films", 08.06.2011, London, England

Permalink: https://www.hzdr.de/publications/Publ-16510