Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

Plasma based ion implantation

Möller, W.

• Book (Authorship)
  H. Schlüter and A. Shivarova (eds.): Advanced Technologies Based on Wave and Beam Generated Plasmas, 191-244, 1999 Kluwer Academic Publishers
• Lecture (Conference)
  NATO ASI, "Advanced Technologies Based on Wave and Beam Generated Plasmas", Sozopol, Bulgaria, May 28 - 30, 1998

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