Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

There are many cases of ion beam processing of materials where ion beam mixing with defect generation and thermally activated processes like defect annealing and phase separation occur at the same time. Examples are ion-irradiation-induced surface pattern selforganisation and nanocluster formation during ion irradiation through interfaces. Here, a new 3D program will be presented which combines the TRIM program for collision cascade simulation with a 3D kinetic Monte-Carlo program describing all kind of relaxation processes.