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Ion Beam Assisted Deposition of AlN Monolithic Films and Al/AlN Multilayers: a Comparative Study

Wang, X.; Kolitsch, A.; Prokert, F.; Möller, W.

• Surface and Coatings Technology 103-104 (1998) 334-339
  DOI: 10.1016/S0257-8972(98)00410-1
  Cited 28 times in Scopus
• Lecture (Conference)
  SMMIB 97, Gatlinburg, TE, USA, Sept. 1997

Permalink: https://www.hzdr.de/publications/Publ-1354