Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

The surface damage (sputtered atoms, adatoms, surface vacancies) produced by ion impact is determined by random displacement of the atom at impact point. Using the statistics of this damage for multiple ion impacts in 3D kinetic lattice Monte Carlo simulations, the self-organization of nano-scale surface pattern by the competition between damage creation and damage diffusion/annealing is studied. Especially, anisotropic displacement of surface atoms creates ripple formation even sputtering is suppressed. The ripple wavelength follows a power low of fluence and temperature of substrate. Local temperature enhancement of impact points refers also Frenkel-pair and ripples on f.c.c.(110) surface. The direction of ripples depends on the temperature of migration atoms which is corresponding to the experimental result of Ag(110) ion bombardment.