Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

Fundamentals and Modelling of Reactive Magnetron Sputtering

Moeller, W.

• Invited lecture (Conferences)
  Tutorial "Fundamentals and Trends of Plasma Surface Processing", 14.09.2008, Garmisch-Partenkirchen, Germany

Permalink: https://www.hzdr.de/publications/Publ-12173