Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationGettering of Iron and Oxygen in Helium-Implanted Czochralski (CZ) and Float-Zone (FZ) Silicon
Yankov, R. A.; Kaschny, J. R.; Fichtner, P. F. P.; Mücklich, A.; Kreißig, U.; Danilin, A. B.; Skorupa, W.
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Poster
E-MRS 98, Strasbourg, June 16-19, 1998
Permalink: https://www.hzdr.de/publications/Publ-1179
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