Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

Computer Simulation of Ion-Assisted Thin Film Deposition

Möller, W.

• Radiation Effects and Defects in Solids, Vol. 141, pp. 73-81
  DOI: 10.1080/10420159708211558
  Cited 3 times in Scopus

Permalink: https://www.hzdr.de/publications/Publ-1103