Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

Target Poisoning during Reactive Magnetron Sputtering

Möller, W.

• Invited lecture (Conferences)
  VEIT 2007 - 15th International Summer School on Vacuum, Electron, and Ion Technologies, 19.09.07, Sozopol, Bulgaria

Permalink: https://www.hzdr.de/publications/Publ-10669