Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationCathodoluminescence of Ion-Implanted Silica Layers
Salh, R.; Fitting-Kourkoutis, L.; Schmidt, B.; Fitting, H.-J.
Abstract
Scanning electron microscopy (SEM) and cathodoluminescence (CL) in combination with scanning transmission electron microscopy (STEM) have been used to investigate thermally grown amorphous silicon dioxide layers implanted isoelectronically with group IV ions (C+, Si+, Ge+, Sn+, Pb+) as well as with group VI ions (O+, S+, Se+).
Keywords: ion implanted SiO2; SEM; CL; STEM
- Microscopy and Microanalysis 13(2007)Suppl. 3, 328-329
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