Fundamentals and applications of ellipsometry

Vinnichenko, M.

HZDR
Institutes
Research
Press & News
Career
Technology Transfer

Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

Total number to be selected: 1 Record

1 Publication

Fundamentals and applications of ellipsometry

Vinnichenko, M.

Abstract

The short tutorial on fundamentals and applications of spectroscopic ellipsometry was given. The sensitivity of the technique in different configurations, problems of data acquisition and analysis have been addressed.

Keywords: Spectroscopic elipsometry

Lecture (others)
Informal seminar at Centro de Micro-Analisis de Materiales (CMAM), 29.06.2007, Madrid, Spain

Permalink: https://www.hzdr.de/publications/Publ-10316

Years: 2023 2022 2021 2020 2019 2018 2017 2016 2015