Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf
1 PublikationImaging and Milling Resolution of Light Ion Beams from HIM and Liquid Metal Alloy Ion Source driven FIBs
Klingner, N.; Hlawacek, G.; Mazarov, P.; Pilz, W.; Meyer, F.; Bischoff, L.
Abstract
The application of Focused Ion Beams (FIB) has become a well-established and promising technique for patterning and prototyping on the nm-scale in research and development. Light ions in the range of m = 1 … 28 u (hydrogen to silicon) are of increasing interest due to the available high beam resolution in the nm range and their special chemical and physical behavior in the substrate. In this work helium and neon ion beams from a Helium Ion Microscope (HIM) are compared with ion beams like beryllium, lithium, boron, carbon and silicon obtained from a mass separated FIB using Liquid Metal Alloy Ion Sources (LMAIS) with respect to their imaging and milling resolution.
Keywords: Focused Ion Beam; Helium Ion Microscope; Gas Field Ion Source; Liquid Metal Alloy Ion Sources; resolution
Beteiligte Forschungsanlagen
- Ionenstrahlzentrum DOI: 10.17815/jlsrf-3-159
Verknüpfte Publikationen
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 31376) publication
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Beilstein Journal of Nanotechnology 11(2020), 1742-1749
DOI: 10.3762/bjnano.11.156
Cited 12 times in Scopus
Permalink: https://www.hzdr.de/publications/Publ-31376
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