Fundamentals and applications of ellipsometry

Vinnichenko, M.

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Fundamentals and applications of ellipsometry

Vinnichenko, M.

Abstract

The short tutorial on fundamentals and applications of spectroscopic ellipsometry was given. The sensitivity of the technique in different configurations, problems of data acquisition and analysis have been addressed.

Keywords: Spectroscopic elipsometry

Sonstiger Vortrag
Informal seminar at Centro de Micro-Analisis de Materiales (CMAM), 29.06.2007, Madrid, Spain

Permalink: https://www.hzdr.de/publications/Publ-10316

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