Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationAdvanced Thermal Processing of Semiconducting Materials Using Flash Lamp Annealing
Skorupa, W.; Panknin, D.; Voelskow, M.; Anwand, W.; Gebel, T.; Yankov, R. A.
Abstract
Advanced Thermal Processing of Semiconducting Materials using Flash Lamp Annealing is Discussed.
Keywords: thermal processing; flash lamp annealing; semiconductors
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Lecture (Conference)
Materials Research Society Spring Meeting, 13.-16.04.2004, San Francisco, USA
Permalink: https://www.hzdr.de/publications/Publ-9922
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