Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationPreparation of SiO2 Films with embedded Si Nanocrystals by Reactive RF-Magnetron Sputtering
Seifarth, H.; Grötzschel, R.; Markwitz, A.; Matz, W.; Nitzsche, P.; Rebohle, L.
-
Thin Solid Films 330 (1998) 202-205
DOI: 10.1016/S0040-6090(98)00609-9
Cited 68 times in Scopus
Permalink: https://www.hzdr.de/publications/Publ-960
Years: 2023 2022 2021 2020 2019 2018 2017 2016 2015