Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

Nanocluster formation: Atomistic simulations and impact of atmospheric humidity

Heinig, K.-H.; Schmidt, B.; Müller, T.

Keywords: ion implantation; Ge and Si nanocluster formation; damaged oxide; moisture penetration

• Lecture (others)
  EC project meeting NEON, CEMES/CNRS, Toulouse, France, Jan 31 -Feb 4, 2001

Permalink: https://www.hzdr.de/publications/Publ-4950