Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationInvestigation of Al-implanted 6H- and 4H-SiC layers after fast heating rate annealings
Ottaviani, L.; Lazar, M.; Locatelli, M. L.; Monteil, Y.; Heera, V.; Voelskow, M.; Skorupa, W.
Keywords: SiC; Al Implantation; High Temperature Annealing
- Appl. Surf. Sci. 184 (2001) 330-335
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