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1 PublicationSensitive multi-element profiling with high depth resolution enabled by time-of-flight recoil detection in transmission using pulsed keV ion beams
Holeňák, R.; Lohmann, S.; Primetzhofer, D.
Abstract
The potential of time-of-flight recoil detection for sensitive multi-element profiling of thin membranes and quasi-2D systems in transmission geometry using pulsed keV ion beams is assessed. While the time-of-flight approach allows for simultaneous detection of multiple elements, to the largest extent irrespective of recoil charge states, the keV projectile energies guarantee high recoil-cross sections yielding high sensitivity at low dose. We demonstrate the capabilities of the approach using 22Ne and 40Ar as projectiles transmitted through thin carbon foils featuring optional LiF-coatings and single-crystalline silicon membranes for different sample preparation routines and crystal orientations.
Using a large position-sensitive detector (0.13 sr), a depth resolution below 6 nm and sensitivity below 1014 atoms/cm2 was achieved for H in a 50 nm thick silicon membrane. For crystalline targets, we show how the probability of creation and detection of recoils and their observed angular distribution depend on sample orientation.
Keywords: Recoils; keV ions; Self-supporting films; Time-of-flight
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Vacuum 204(2022), 111343
DOI: 10.1016/j.vacuum.2022.111343
arXiv: 2203.09419
Cited 2 times in Scopus
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