Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationFlash lamp annealing of GaN
Rebohle, L.; Prucnal, S.; Akhmadaliev, S.; Kentsch, U.
Abstract
The presentation gives a short overview of our recent activities to dope GaN with Mg by ion implantation and flash lamp annealing.
Keywords: gallium nitride; Mg doping; ion implantation; flash lamp annealing
Involved research facilities
- Ion Beam Center DOI: 10.17815/jlsrf-3-159
Related publications
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 34756) publication
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Lecture (Conference)
Nutzertreffen "Heißprozesse und RTP" und "Ionenimplantation", 18.05.2022, Erlangen, Deutschland
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