Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationData publication: Controlled Silicidation of SiNW using FLA
Khan, M. B.; Prucnal, S.; Ghosh, S.; Deb, D.; Hübner, R.; Pohl, D.; Rebohle, L.; Mikolajick, T.; Erbe, A.; Georgiev, Y.
Abstract
The folder contains the following: 1. all the SEM and TEM images. 2. The schematics of fabrication 3. comparison of silicidation with FLA and RTA and 4. temperature simulations to estimate temperature during FLA process.
Involved research facilities
- Ion Beam Center DOI: 10.17815/jlsrf-3-159
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Controlled Silicidation of Silicon Nanowires using Flash Lamp Annealing
ROBIS: 33436 has used this (Id 33452) publication of HZDR-primary research data
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Reseach data in the HZDR data repository RODARE
Publication date: 2021-11-23 Open access
DOI: 10.14278/rodare.1269
Versions: 10.14278/rodare.1270
License: CC-BY-4.0
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Permalink: https://www.hzdr.de/publications/Publ-33452
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